By Minhang Bao

ISBN-10: 008045562X

ISBN-13: 9780080455624

ISBN-10: 0444516166

ISBN-13: 9780444516169

Sensors and actuators are actually a part of our daily life and seem in lots of home equipment, reminiscent of autos, merchandising machines and washing machines. MEMS (Micro Electro Mechanical platforms) are micro platforms inclusive of micro mechanical sensors, actuators and micro digital circuits. numerous MEMS units were constructed and plenty of mass produced, however the info on those is generally dispersed within the literature. This e-book offers the research and layout ideas of MEMS units. the knowledge is entire, concentrating on microdynamics, resembling the mechanics of beam and diaphragm buildings, air damping and its impact at the movement of mechanical constructions. utilizing useful examples, the writer examines difficulties linked to research and layout, and strategies are incorporated behind the e-book. definitely the right complicated point textbook for graduates, Analysis and layout ideas of MEMS Devices is an appropriate resource of reference for researchers and engineers within the box.

* provides the research and layout ideas of MEMS units extra systematically than ever before.

* contains the theories crucial for the research and layout of MEMS comprises the dynamics of micro mechanical structures

* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the booklet.

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Extra info for Analysis and Design Principles of MEMS Devices

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From Eq.

3) Electrostatic driving (Chap. 4) Sensing schemes Frequency sensing (Chap. 6) References [1] S. M. Sze (editor), VLSI Technology, 2nd edition, McGraw-Hill, New York, 1988 [2] S. M. , 1994 [3] J. Brysek, K. Petersen, J. K. Mallon, L. Christel, F. S. Smith, Piezoresistance in germanium and silicon, Physics Review, Vol. 94 (1954)42-49 [5] O. N. W. Chapman, D. Long, Silicon diffused-element piezoresistive diaphragms, Journal of Applied Physics, Vol. 33 (1962) 3322-3327 [6] A. C. M. J. Somers, Miniature pressure transducers with a silicon diaphragm, Philips Tech.

5. The width, thickness and the length of the beam are b, h, and L, respectively. 2. , F=Mg. Also assume that the end mass, M, is much larger than the beam mass, so that the gravitational force of the beam can be neglected. To balance the loading force, F, there must be a supporting force, Fo, acting on the beam at the clamped end. The force balance in the z-direction requires that F0=F. In the meantime, there must be a restrictive bending moment, m0, at the clamped end of the beam to balance the bending moment caused by the loading force, F.

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